Isotopic substitution of boron and carbon in superconducting diamond epilayers grown by MPCVD
Sets of heavily boron-doped {100}-oriented diamond epilayers have been grown by MPCVD from isotope-enriched gases such as 13CH 4 and 10B 2H 6 or 13CH 4 and naturally abundant 11B 2H 6, and the resulting concentration profiles of the various boron isotopes were measured by SIMS. In the particular cas...
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Veröffentlicht in: | Diamond and related materials 2010-07, Vol.19 (7), p.814-817 |
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Sprache: | eng |
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