Supercritical fluid deposition of compositionally uniform yttria stabilized zirconia films

[Display omitted] ► YSZ thin films are formed by supercritical fluid deposition by hydrolysis of Zr and Y β-diketonates in scCO2. ► Precursors have different deposition rates resulting in a gradient in film composition. ► Cyclic deposition process leads to uniform YSZ films with stable composition....

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Veröffentlicht in:	The Journal of supercritical fluids 2012-06, Vol.66, p.328-332
Hauptverfasser:	Le Trequesser, Quentin, Mesguich, David, You, Eunyoung, Aymonier, Cyril, Watkins, James J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Carbon dioxide Chemical Sciences Cyclic deposition Deposition Material chemistry Micro-SOFC Oxides Precursors Supercritical fluid deposition Supercritical fluids Thin films X-rays Yttria stabilized zirconia Yttria stabilized zirconia thin films
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