Perovskite oxynitride LaTiOxNy thin films: Dielectric characterization in low and high frequencies

Lanthanum titanium oxynitride (LaTiOxNy) thin films are studied with respect to their dielectric properties in low and high frequencies. Thin films are deposited by radio frequency magnetron sputtering on different substrates. Effects of nitrogen content and crystalline quality on dielectric propert...

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Veröffentlicht in:	Thin solid films 2011-11, Vol.520 (2), p.778-783
Hauptverfasser:	LU, Y, ZIANI, A, SHARAIHA, A, LE PAVEN-THIVET, C, BENZERGA, R, LE GENDRE, L, FASQUELLE, D, KASSEM, H, TESSIER, F, VIGNERAS, V, CARRU, J.-C
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical Sciences Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Deposition by sputtering Dielectric thin films Dielectrics, piezoelectrics, and ferroelectrics and their properties Exact sciences and technology Material chemistry Materials science Methods of deposition of films and coatings film growth and epitaxy Physics
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