Electrode oxygen-affinity influence on voltage nonlinearities in high-k metal-insulator-metal capacitors
This work highlights the influence of the oxygen affinity of the metal electrodes used in high-k metal-insulator-metal capacitors. Several metallic electrodes are tested in order to investigate the role of the metal work function, and the role of the electrode oxygen-affinity in nonlinear behavior o...
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| Veröffentlicht in: | Applied physics letters 2010-06, Vol.96 (23), p.233504-233504-3 |
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| container_title | Applied physics letters |
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| creator | Vallée, C. Gonon, P. Jorel, C. El Kamel, F. |
| description | This work highlights the influence of the oxygen affinity of the metal electrodes used in high-k metal-insulator-metal capacitors. Several metallic electrodes are tested in order to investigate the role of the metal work function, and the role of the electrode oxygen-affinity in nonlinear behavior of
HfO
2
and
BaTiO
3
capacitors. It is shown that the magnitude of the quadratic coefficient of nonlinearity is better explained by the electrode oxygen-affinity rather than by its work function. It is thought that electrode oxidation increases the number of oxygen vacancies at the electrode/dielectric interface, and so increases the magnitude of nonlinearity. |
| doi_str_mv | 10.1063/1.3447795 |
| format | Article |
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HfO
2
and
BaTiO
3
capacitors. It is shown that the magnitude of the quadratic coefficient of nonlinearity is better explained by the electrode oxygen-affinity rather than by its work function. It is thought that electrode oxidation increases the number of oxygen vacancies at the electrode/dielectric interface, and so increases the magnitude of nonlinearity.</description><identifier>ISSN: 0003-6951</identifier><identifier>EISSN: 1077-3118</identifier><identifier>DOI: 10.1063/1.3447795</identifier><identifier>CODEN: APPLAB</identifier><language>eng</language><publisher>American Institute of Physics</publisher><subject>Condensed Matter ; Engineering Sciences ; Materials Science ; Micro and nanotechnologies ; Microelectronics ; Physics</subject><ispartof>Applied physics letters, 2010-06, Vol.96 (23), p.233504-233504-3</ispartof><rights>2010 American Institute of Physics</rights><rights>Distributed under a Creative Commons Attribution 4.0 International License</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c353t-27535ff5ece132102e3f3a0d1d67ba7066c658335ad07427c9680951d45be5c43</citedby><cites>FETCH-LOGICAL-c353t-27535ff5ece132102e3f3a0d1d67ba7066c658335ad07427c9680951d45be5c43</cites><orcidid>0000-0001-6803-1688</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://pubs.aip.org/apl/article-lookup/doi/10.1063/1.3447795$$EHTML$$P50$$Gscitation$$H</linktohtml><link.rule.ids>230,315,781,785,795,886,1560,4513,27929,27930,76389,76395</link.rule.ids><backlink>$$Uhttps://hal.science/hal-00635943$$DView record in HAL$$Hfree_for_read</backlink></links><search><creatorcontrib>Vallée, C.</creatorcontrib><creatorcontrib>Gonon, P.</creatorcontrib><creatorcontrib>Jorel, C.</creatorcontrib><creatorcontrib>El Kamel, F.</creatorcontrib><title>Electrode oxygen-affinity influence on voltage nonlinearities in high-k metal-insulator-metal capacitors</title><title>Applied physics letters</title><description>This work highlights the influence of the oxygen affinity of the metal electrodes used in high-k metal-insulator-metal capacitors. Several metallic electrodes are tested in order to investigate the role of the metal work function, and the role of the electrode oxygen-affinity in nonlinear behavior of
HfO
2
and
BaTiO
3
capacitors. It is shown that the magnitude of the quadratic coefficient of nonlinearity is better explained by the electrode oxygen-affinity rather than by its work function. It is thought that electrode oxidation increases the number of oxygen vacancies at the electrode/dielectric interface, and so increases the magnitude of nonlinearity.</description><subject>Condensed Matter</subject><subject>Engineering Sciences</subject><subject>Materials Science</subject><subject>Micro and nanotechnologies</subject><subject>Microelectronics</subject><subject>Physics</subject><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2010</creationdate><recordtype>article</recordtype><recordid>eNp1kMFOAjEQhhujiYgefIO9eii2O9stezEhBMWExIuem9Jt2WppybYQeXuLEDx5mvwz30wyH0L3lIwoqeGRjqCqOG_YBRpQwjkGSseXaEAIAVw3jF6jmxg_c2QlwAB1M6dV6kOri_C9X2mPpTHW27QvrDduq73KE1_sgktypQsfvLNey94mq2Nmis6uOvxVrHWSDlsft06m0OPfXCi5kcrmHG_RlZEu6rtTHaKP59n7dI4Xby-v08kCK2CQcMkZMGOYVppCSUmpwYAkLW1rvpSc1LWq2RiAyZbwquSqqcckv9VWbKmZqmCIHo53O-nEprdr2e9FkFbMJwtx6JGsiTUV7Ogfq_oQY6_NeYEScdApqDjpzOzTkY35H5ls8P_DZ6fi6FRkp_ADlMB9aw</recordid><startdate>20100607</startdate><enddate>20100607</enddate><creator>Vallée, C.</creator><creator>Gonon, P.</creator><creator>Jorel, C.</creator><creator>El Kamel, F.</creator><general>American Institute of Physics</general><scope>AAYXX</scope><scope>CITATION</scope><scope>1XC</scope><scope>VOOES</scope><orcidid>https://orcid.org/0000-0001-6803-1688</orcidid></search><sort><creationdate>20100607</creationdate><title>Electrode oxygen-affinity influence on voltage nonlinearities in high-k metal-insulator-metal capacitors</title><author>Vallée, C. ; Gonon, P. ; Jorel, C. ; El Kamel, F.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c353t-27535ff5ece132102e3f3a0d1d67ba7066c658335ad07427c9680951d45be5c43</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2010</creationdate><topic>Condensed Matter</topic><topic>Engineering Sciences</topic><topic>Materials Science</topic><topic>Micro and nanotechnologies</topic><topic>Microelectronics</topic><topic>Physics</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Vallée, C.</creatorcontrib><creatorcontrib>Gonon, P.</creatorcontrib><creatorcontrib>Jorel, C.</creatorcontrib><creatorcontrib>El Kamel, F.</creatorcontrib><collection>CrossRef</collection><collection>Hyper Article en Ligne (HAL)</collection><collection>Hyper Article en Ligne (HAL) (Open Access)</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Vallée, C.</au><au>Gonon, P.</au><au>Jorel, C.</au><au>El Kamel, F.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Electrode oxygen-affinity influence on voltage nonlinearities in high-k metal-insulator-metal capacitors</atitle><jtitle>Applied physics letters</jtitle><date>2010-06-07</date><risdate>2010</risdate><volume>96</volume><issue>23</issue><spage>233504</spage><epage>233504-3</epage><pages>233504-233504-3</pages><issn>0003-6951</issn><eissn>1077-3118</eissn><coden>APPLAB</coden><abstract>This work highlights the influence of the oxygen affinity of the metal electrodes used in high-k metal-insulator-metal capacitors. Several metallic electrodes are tested in order to investigate the role of the metal work function, and the role of the electrode oxygen-affinity in nonlinear behavior of
HfO
2
and
BaTiO
3
capacitors. It is shown that the magnitude of the quadratic coefficient of nonlinearity is better explained by the electrode oxygen-affinity rather than by its work function. It is thought that electrode oxidation increases the number of oxygen vacancies at the electrode/dielectric interface, and so increases the magnitude of nonlinearity.</abstract><pub>American Institute of Physics</pub><doi>10.1063/1.3447795</doi><orcidid>https://orcid.org/0000-0001-6803-1688</orcidid><oa>free_for_read</oa></addata></record> |
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| issn | 0003-6951 1077-3118 |
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| source | AIP Journals Complete; AIP Digital Archive; Alma/SFX Local Collection |
| subjects | Condensed Matter Engineering Sciences Materials Science Micro and nanotechnologies Microelectronics Physics |
| title | Electrode oxygen-affinity influence on voltage nonlinearities in high-k metal-insulator-metal capacitors |
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