Real-time high-resolution topographic imagery using interference microscopy

New instrumentation has been developed that is dedicated to the measurement of surface morphology with high resolutions and short acquisition times. Sinusoidal phase-shifting interferometry is demonstrated to provide within an acquisition time of only a few milliseconds topographic images with ~1 nm...

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Bibliographische Detailangaben

Veröffentlicht in:	European physical journal. Applied physics 2002-12, Vol.20 (3), p.169-175
Hauptverfasser:	Dubois, A., Vabre, L., Boccara, A.-C., Montgomery, P. C., Cunin, B., Reibel, Y., Draman, C.
Format:	Artikel
Sprache:	eng
Schlagworte:	07.60.Pb Conventional optical microscopes Cross-disciplinary physics: materials science rheology Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Materials science Materials testing Nondestructive testing: optical methods Optical instruments, equipment and techniques Optics Physics
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