Computer aided design of Langasite resonant cantilevers: analytical models and simulations
Analytical models for the piezoelectric excitation and for the wet micromachining of resonant cantilevers are proposed. Firstly, computations of metrological performances of micro-resonators allow us to select special cuts and special alignment of the cantilevers. Secondly the self-elaborated simula...
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| Veröffentlicht in: | European physical journal. Applied physics 2010-05, Vol.50 (2), p.20303 |
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| creator | Tellier, C. R. Leblois, T. G. Durand, S. |
| description | Analytical models for the piezoelectric excitation and for the wet micromachining of resonant cantilevers are proposed. Firstly, computations of metrological performances of micro-resonators allow us to select special cuts and special alignment of the cantilevers. Secondly the self-elaborated simulator TENSOSIM based on the kinematic and tensorial model furnishes etching shapes of cantilevers. As the result the number of selected cuts is reduced. Finally the simulator COMSOL® is used to evaluate the influence of final etching shape on metrological performances and especially on the resonance frequency. Changes in frequency are evaluated and deviating behaviours of structures with less favourable built-ins are tested showing that the X cut is the best cut for LGS resonant cantilevers vibrating in flexural modes (type 1 and type 2) or in torsion mode. |
| doi_str_mv | 10.1051/epjap/2010039 |
| format | Article |
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Changes in frequency are evaluated and deviating behaviours of structures with less favourable built-ins are tested showing that the X cut is the best cut for LGS resonant cantilevers vibrating in flexural modes (type 1 and type 2) or in torsion mode.</description><identifier>ISSN: 1286-0042</identifier><identifier>EISSN: 1286-0050</identifier><identifier>DOI: 10.1051/epjap/2010039</identifier><language>eng</language><publisher>Les Ulis: EDP Sciences</publisher><subject>Applied sciences ; Circuit properties ; Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Dielectric, piezoelectric, ferroelectric and antiferroelectric materials ; Dielectrics, piezoelectrics, and ferroelectrics and their properties ; Electric, optical and optoelectronic circuits ; Electronic circuits ; Electronics ; Exact sciences and technology ; Microelectronic fabrication (materials and surfaces technology) ; Oscillators, resonators, synthetizers ; Physics ; Semiconductor electronics. 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R.</creatorcontrib><creatorcontrib>Leblois, T. G.</creatorcontrib><creatorcontrib>Durand, S.</creatorcontrib><title>Computer aided design of Langasite resonant cantilevers: analytical models and simulations</title><title>European physical journal. Applied physics</title><description>Analytical models for the piezoelectric excitation and for the wet micromachining of resonant cantilevers are proposed. Firstly, computations of metrological performances of micro-resonators allow us to select special cuts and special alignment of the cantilevers. Secondly the self-elaborated simulator TENSOSIM based on the kinematic and tensorial model furnishes etching shapes of cantilevers. As the result the number of selected cuts is reduced. Finally the simulator COMSOL® is used to evaluate the influence of final etching shape on metrological performances and especially on the resonance frequency. Changes in frequency are evaluated and deviating behaviours of structures with less favourable built-ins are tested showing that the X cut is the best cut for LGS resonant cantilevers vibrating in flexural modes (type 1 and type 2) or in torsion mode.</description><subject>Applied sciences</subject><subject>Circuit properties</subject><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties</subject><subject>Dielectric, piezoelectric, ferroelectric and antiferroelectric materials</subject><subject>Dielectrics, piezoelectrics, and ferroelectrics and their properties</subject><subject>Electric, optical and optoelectronic circuits</subject><subject>Electronic circuits</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>Microelectronic fabrication (materials and surfaces technology)</subject><subject>Oscillators, resonators, synthetizers</subject><subject>Physics</subject><subject>Semiconductor electronics. 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| ispartof | European physical journal. Applied physics, 2010-05, Vol.50 (2), p.20303 |
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| language | eng |
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| source | Bacon EDP Sciences France Licence nationale-ISTEX-PS-Journals-PFISTEX; EDP Sciences |
| subjects | Applied sciences Circuit properties Condensed matter: electronic structure, electrical, magnetic, and optical properties Dielectric, piezoelectric, ferroelectric and antiferroelectric materials Dielectrics, piezoelectrics, and ferroelectrics and their properties Electric, optical and optoelectronic circuits Electronic circuits Electronics Exact sciences and technology Microelectronic fabrication (materials and surfaces technology) Oscillators, resonators, synthetizers Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices |
| title | Computer aided design of Langasite resonant cantilevers: analytical models and simulations |
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