Ultra-smooth LiNbO3 micro and nano structures for photonic applications

We report on two approaches to achieve ultra-smooth structures on lithium niobate (LiNbO3) substrates. The first method relies on ICP-RIE (inductively coupled-reactive ionic etching) or on RIE, and is exploited here for the fabrication of rods with smooth etched surfaces. A series of tests have been...

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Veröffentlicht in:	Microelectronic engineering 2011-08, Vol.88 (8), p.2417-2419
Hauptverfasser:	Ulliac, Gwenn, Guichardaz, Blandine, Rauch, Jean-Yves, Queste, Samuel, Benchabane, Sarah, Courjal, Nadège
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Circuit properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Electric, optical and optoelectronic circuits Electronics Engineering Sciences Etching Exact sciences and technology ICP-RIE Integrated optics. Optical fibers and wave guides LiNbO3 Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties Materials science Microelectronic fabrication (materials and surfaces technology) Nanocomposites Nanomaterials Nanostructure Noise levels Optical and optoelectronic circuits Optical data processing Optical grade dicing Optics Photonic Physics Ridges RIE Rods Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Surface treatments Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
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