Langasite based surface acoustic wave sensors for high temperature chemical detection in harsh environment: Design of the transducers and packaging

This work presents the design and the thermal behavior characterization of an innovative self-test portable surface acoustic wave platform for chemical detection under high temperature. Before the forthcoming deposition of the sensitive coating, the thermal behavior of the bare LGS acoustic platform...

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Veröffentlicht in:	Sensors and actuators. B, Chemical Chemical, 2011-08, Vol.156 (2), p.510-516
Hauptverfasser:	Tortissier, G., Blanc, L., Tetelin, A., Lachaud, J.-L., Benoit, M., Conédéra, V., Dejous, C., Rebière, D.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic sensors Acoustics ceramics coatings Engineering Sciences equations Heaters High temperature sensor Langasite Mathematical analysis Mathematical models Micro and nanotechnologies Microelectronics Packaging Platforms polychlorinated biphenyls prediction SAW modeling stainless steel Surface acoustic waves temperature thermal properties thermal stress Transducers
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