AlN as an actuation material for MEMS applications The case of AlN driven multilayered cantilevers

This paper treats a wide range of subjects related to the use of AlN as actuation layer in MEMS, from its deposition conditions to accurate interferometric device characterization and physical parameters extraction. The case of AlN driven multilayered cantilevers has been considered. Parameters such...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Sensors and actuators. A. Physical. 2008-02, Vol.141 (2), p.565-576
Hauptverfasser:	Andrei, Alexandru, Krupa, Katarzyna, Jozwik, Michal, Delobelle, Patrick, Hirsinger, Laurent, Gorecki, Christophe, Nieradko, Lukasz, Meunier, Cathy
Format:	Artikel
Sprache:	eng
Schlagworte:	Engineering Sciences Mechanics Micro and nanotechnologies Microelectronics
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!