Vibration measurement with a micromachined mirror in a very-short external cavity laser

We have fabricated, modeled and tested a displacement sensor based on an external cavity laser with a micro-mirror integrated with a positioning actuator. We have developed an improved model for simulating the intensity change in the external cavity laser when the feedback from the external mirror e...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2004-10, Vol.116 (2), p.232-240
Hauptverfasser:	Chollet, Franck, Hegde, Gopal M., Xuming, Zhang, Aiqun, Liu, Asundi, Anand
Format:	Artikel
Sprache:	eng
Schlagworte:	Accelerometer Displacement sensor Engineering Sciences External-cavity laser Interferometer Large range Laser feedback Micro and nanotechnologies Microelectronics Micromachining MOEMS Optics Photonic Physics Self-mixing
Online-Zugang:	Volltext
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