Nanocomposite tantalum–carbon-based films deposited by femtosecond pulsed laser ablation

Nanostructured coatings of metal (tantalum) containing diamond-like carbon (a-C:Ta) have been prepared by femtosecond pulsed laser deposition (PLD). The films, containing 15 at.% tantalum, have been deposited by ablating sequentially graphite and metallic tantalum in vacuum conditions with an amplif...

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Veröffentlicht in:	Thin solid films 2006-01, Vol.494 (1), p.98-104
Hauptverfasser:	Benchikh, N., Garrelie, F., Wolski, K., Donnet, C., Fillit, R.Y., Rogemond, F., Subtil, J.L., Rouzaud, J.N., Laval, J.Y.
Format:	Artikel
Sprache:	eng
Schlagworte:	Cross-disciplinary physics: materials science rheology Doped diamond-like carbon Engineering Sciences Exact sciences and technology Femtosecond laser Laser deposition Materials Materials science Methods of deposition of films and coatings film growth and epitaxy Nanocrystalline materials Nanoscale materials and structures: fabrication and characterization Optics Photonic Physics Plasmas Pulsed loser ablation
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