Nanocomposite tantalum–carbon-based films deposited by femtosecond pulsed laser ablation

Nanostructured coatings of metal (tantalum) containing diamond-like carbon (a-C:Ta) have been prepared by femtosecond pulsed laser deposition (PLD). The films, containing 15 at.% tantalum, have been deposited by ablating sequentially graphite and metallic tantalum in vacuum conditions with an amplif...

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Veröffentlicht in:Thin solid films 2006-01, Vol.494 (1), p.98-104
Hauptverfasser: Benchikh, N., Garrelie, F., Wolski, K., Donnet, C., Fillit, R.Y., Rogemond, F., Subtil, J.L., Rouzaud, J.N., Laval, J.Y.
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container_end_page 104
container_issue 1
container_start_page 98
container_title Thin solid films
container_volume 494
creator Benchikh, N.
Garrelie, F.
Wolski, K.
Donnet, C.
Fillit, R.Y.
Rogemond, F.
Subtil, J.L.
Rouzaud, J.N.
Laval, J.Y.
description Nanostructured coatings of metal (tantalum) containing diamond-like carbon (a-C:Ta) have been prepared by femtosecond pulsed laser deposition (PLD). The films, containing 15 at.% tantalum, have been deposited by ablating sequentially graphite and metallic tantalum in vacuum conditions with an amplified Ti:sapphire laser. The coatings have been investigated by X-ray photoelectron spectroscopy, grazing angle X-ray diffraction, energy filtered transmission electron microscopy, scanning and high resolution transmission electron microscopies. Evidence of metallic α-Ta and β-Ta particles (diameter in the 100 nm range) and smaller quasi-amorphous tantalum clusters embedded in the carbonaceous matrix have been shown. A thin tantalum carbide interface between the carbon matrix and the top surface of the tantalum nodules has also been identified. The ability of femtosecond pulsed laser deposition to synthetize nanocomposite carbon-based films and to control their nanostructure is discussed.
doi_str_mv 10.1016/j.tsf.2005.07.161
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subjects Cross-disciplinary physics: materials science
rheology
Doped diamond-like carbon
Engineering Sciences
Exact sciences and technology
Femtosecond laser
Laser deposition
Materials
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Nanocrystalline materials
Nanoscale materials and structures: fabrication and characterization
Optics
Photonic
Physics
Plasmas
Pulsed loser ablation
title Nanocomposite tantalum–carbon-based films deposited by femtosecond pulsed laser ablation
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