Some features of optical waveguide realization in polymer for large scale circuit integration

With a view to improving the realisation of polymer optical waveguide some features relevant to the photolithography process are analysed. This paper focuses on defects that occur on the surface of polymer layers involved in the process. For example, depending on the heat treatment or the deposited...

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Veröffentlicht in:	Applied surface science 2007-05, Vol.253 (Issue 14)
Hauptverfasser:	Bosc, Dominique, Maalouf, Azar, Haesaert, Severine, Henrio, Frederic
Format:	Artikel
Sprache:	eng
Schlagworte:	Optics Physics
Online-Zugang:	Volltext
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