Influence of the nature of the screen-printed electrode metal on the transport and detection properties of thick-film semiconductor gas sensors
In the design of semiconductor gas sensors, commercially available metallic inks or pastes have been used more or less indifferently for making the electrical contacts with the oxide. It has usually been assumed that the metallic electrodes do not take any part in the electrical and gas-detection pr...
Gespeichert in:
Veröffentlicht in: | Sensors and actuators. B, Chemical Chemical, 1992, Vol.6 (1), p.279-284 |
---|---|
Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
container_end_page | 284 |
---|---|
container_issue | 1 |
container_start_page | 279 |
container_title | Sensors and actuators. B, Chemical |
container_volume | 6 |
creator | Dutronc, Pascale Carbonne, Bertrand Menil, Francis Lucat, Claude |
description | In the design of semiconductor gas sensors, commercially available metallic inks or pastes have been used more or less indifferently for making the electrical contacts with the oxide. It has usually been assumed that the metallic electrodes do not take any part in the electrical and gas-detection processes. Careful measurements with layers of tin oxide and iron oxide, screen printed above interdigitated electrodes made with metallic inks of gold, platinum, platinum/gold, nickel and silver/palladium and with sputtered gold, show that the nature of the metal as well as the type of deposition (screen printing or sputtering) may have a considerable influence on both resistances and gas sensitivities. An interpretation based on the formation of an additional interface resistance while firing the oxide layer is proposed. |
doi_str_mv | 10.1016/0925-4005(92)80070-E |
format | Article |
fullrecord | <record><control><sourceid>elsevier_hal_p</sourceid><recordid>TN_cdi_hal_primary_oai_HAL_hal_00196232v1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>092540059280070E</els_id><sourcerecordid>092540059280070E</sourcerecordid><originalsourceid>FETCH-LOGICAL-c338t-910e7b412a00cd478ca5c7fc8564f01e7f69d61accc9553fdee9bc1132f1f7f3</originalsourceid><addsrcrecordid>eNp9kMFqGzEQhkVooa6bN-hBx-awzWi1u9q9FEJw6oAhF9-FMholSteSkeRAnyKvnF07-JiT0Mz3_zAfYz8F_BYgumsY6rZqANpfQ33VAyioVhdsIXolKwlKfWGLM_KNfc_5BQAa2cGCvd0HNx4oIPHoeHkmHkw5pPMvYyIK1T75UMhyGglLipb4jooZeQxHqiQT8j6mwk2w3FKZKD_t9inuKRVP-dTn8V_l_LjjmXYeY7AHLDHxJ5OnScgx5R_sqzNjpsuPd8m2d6vt7braPPy9v73ZVChlX6pBAKnHRtQGAG2jejQtKod92zUOBCnXDbYTBhGHtpXOEg2PKISsnXDKySW7OtU-m1FPx-1M-q-j8Xp9s9HzDEAMXS3rVzGxzYnFFHNO5M4BAXr2r2e5eparh1of_evVFPtzitF0xqunpDP6WbT1adKjbfSfF7wDuKyP1Q</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Influence of the nature of the screen-printed electrode metal on the transport and detection properties of thick-film semiconductor gas sensors</title><source>Elsevier ScienceDirect Journals</source><creator>Dutronc, Pascale ; Carbonne, Bertrand ; Menil, Francis ; Lucat, Claude</creator><creatorcontrib>Dutronc, Pascale ; Carbonne, Bertrand ; Menil, Francis ; Lucat, Claude</creatorcontrib><description>In the design of semiconductor gas sensors, commercially available metallic inks or pastes have been used more or less indifferently for making the electrical contacts with the oxide. It has usually been assumed that the metallic electrodes do not take any part in the electrical and gas-detection processes. Careful measurements with layers of tin oxide and iron oxide, screen printed above interdigitated electrodes made with metallic inks of gold, platinum, platinum/gold, nickel and silver/palladium and with sputtered gold, show that the nature of the metal as well as the type of deposition (screen printing or sputtering) may have a considerable influence on both resistances and gas sensitivities. An interpretation based on the formation of an additional interface resistance while firing the oxide layer is proposed.</description><identifier>ISSN: 0925-4005</identifier><identifier>EISSN: 1873-3077</identifier><identifier>DOI: 10.1016/0925-4005(92)80070-E</identifier><language>eng</language><publisher>Elsevier B.V</publisher><subject>Engineering Sciences ; Micro and nanotechnologies ; Microelectronics</subject><ispartof>Sensors and actuators. B, Chemical, 1992, Vol.6 (1), p.279-284</ispartof><rights>1992</rights><rights>Distributed under a Creative Commons Attribution 4.0 International License</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c338t-910e7b412a00cd478ca5c7fc8564f01e7f69d61accc9553fdee9bc1132f1f7f3</citedby><cites>FETCH-LOGICAL-c338t-910e7b412a00cd478ca5c7fc8564f01e7f69d61accc9553fdee9bc1132f1f7f3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://www.sciencedirect.com/science/article/pii/092540059280070E$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>230,314,776,780,881,3537,4010,27900,27901,27902,65306</link.rule.ids><backlink>$$Uhttps://hal.science/hal-00196232$$DView record in HAL$$Hfree_for_read</backlink></links><search><creatorcontrib>Dutronc, Pascale</creatorcontrib><creatorcontrib>Carbonne, Bertrand</creatorcontrib><creatorcontrib>Menil, Francis</creatorcontrib><creatorcontrib>Lucat, Claude</creatorcontrib><title>Influence of the nature of the screen-printed electrode metal on the transport and detection properties of thick-film semiconductor gas sensors</title><title>Sensors and actuators. B, Chemical</title><description>In the design of semiconductor gas sensors, commercially available metallic inks or pastes have been used more or less indifferently for making the electrical contacts with the oxide. It has usually been assumed that the metallic electrodes do not take any part in the electrical and gas-detection processes. Careful measurements with layers of tin oxide and iron oxide, screen printed above interdigitated electrodes made with metallic inks of gold, platinum, platinum/gold, nickel and silver/palladium and with sputtered gold, show that the nature of the metal as well as the type of deposition (screen printing or sputtering) may have a considerable influence on both resistances and gas sensitivities. An interpretation based on the formation of an additional interface resistance while firing the oxide layer is proposed.</description><subject>Engineering Sciences</subject><subject>Micro and nanotechnologies</subject><subject>Microelectronics</subject><issn>0925-4005</issn><issn>1873-3077</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1992</creationdate><recordtype>article</recordtype><recordid>eNp9kMFqGzEQhkVooa6bN-hBx-awzWi1u9q9FEJw6oAhF9-FMholSteSkeRAnyKvnF07-JiT0Mz3_zAfYz8F_BYgumsY6rZqANpfQ33VAyioVhdsIXolKwlKfWGLM_KNfc_5BQAa2cGCvd0HNx4oIPHoeHkmHkw5pPMvYyIK1T75UMhyGglLipb4jooZeQxHqiQT8j6mwk2w3FKZKD_t9inuKRVP-dTn8V_l_LjjmXYeY7AHLDHxJ5OnScgx5R_sqzNjpsuPd8m2d6vt7braPPy9v73ZVChlX6pBAKnHRtQGAG2jejQtKod92zUOBCnXDbYTBhGHtpXOEg2PKISsnXDKySW7OtU-m1FPx-1M-q-j8Xp9s9HzDEAMXS3rVzGxzYnFFHNO5M4BAXr2r2e5eparh1of_evVFPtzitF0xqunpDP6WbT1adKjbfSfF7wDuKyP1Q</recordid><startdate>1992</startdate><enddate>1992</enddate><creator>Dutronc, Pascale</creator><creator>Carbonne, Bertrand</creator><creator>Menil, Francis</creator><creator>Lucat, Claude</creator><general>Elsevier B.V</general><general>Elsevier</general><scope>AAYXX</scope><scope>CITATION</scope><scope>1XC</scope></search><sort><creationdate>1992</creationdate><title>Influence of the nature of the screen-printed electrode metal on the transport and detection properties of thick-film semiconductor gas sensors</title><author>Dutronc, Pascale ; Carbonne, Bertrand ; Menil, Francis ; Lucat, Claude</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c338t-910e7b412a00cd478ca5c7fc8564f01e7f69d61accc9553fdee9bc1132f1f7f3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1992</creationdate><topic>Engineering Sciences</topic><topic>Micro and nanotechnologies</topic><topic>Microelectronics</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Dutronc, Pascale</creatorcontrib><creatorcontrib>Carbonne, Bertrand</creatorcontrib><creatorcontrib>Menil, Francis</creatorcontrib><creatorcontrib>Lucat, Claude</creatorcontrib><collection>CrossRef</collection><collection>Hyper Article en Ligne (HAL)</collection><jtitle>Sensors and actuators. B, Chemical</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Dutronc, Pascale</au><au>Carbonne, Bertrand</au><au>Menil, Francis</au><au>Lucat, Claude</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Influence of the nature of the screen-printed electrode metal on the transport and detection properties of thick-film semiconductor gas sensors</atitle><jtitle>Sensors and actuators. B, Chemical</jtitle><date>1992</date><risdate>1992</risdate><volume>6</volume><issue>1</issue><spage>279</spage><epage>284</epage><pages>279-284</pages><issn>0925-4005</issn><eissn>1873-3077</eissn><abstract>In the design of semiconductor gas sensors, commercially available metallic inks or pastes have been used more or less indifferently for making the electrical contacts with the oxide. It has usually been assumed that the metallic electrodes do not take any part in the electrical and gas-detection processes. Careful measurements with layers of tin oxide and iron oxide, screen printed above interdigitated electrodes made with metallic inks of gold, platinum, platinum/gold, nickel and silver/palladium and with sputtered gold, show that the nature of the metal as well as the type of deposition (screen printing or sputtering) may have a considerable influence on both resistances and gas sensitivities. An interpretation based on the formation of an additional interface resistance while firing the oxide layer is proposed.</abstract><pub>Elsevier B.V</pub><doi>10.1016/0925-4005(92)80070-E</doi><tpages>6</tpages></addata></record> |
fulltext | fulltext |
identifier | ISSN: 0925-4005 |
ispartof | Sensors and actuators. B, Chemical, 1992, Vol.6 (1), p.279-284 |
issn | 0925-4005 1873-3077 |
language | eng |
recordid | cdi_hal_primary_oai_HAL_hal_00196232v1 |
source | Elsevier ScienceDirect Journals |
subjects | Engineering Sciences Micro and nanotechnologies Microelectronics |
title | Influence of the nature of the screen-printed electrode metal on the transport and detection properties of thick-film semiconductor gas sensors |
url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-29T06%3A00%3A30IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-elsevier_hal_p&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Influence%20of%20the%20nature%20of%20the%20screen-printed%20electrode%20metal%20on%20the%20transport%20and%20detection%20properties%20of%20thick-film%20semiconductor%20gas%20sensors&rft.jtitle=Sensors%20and%20actuators.%20B,%20Chemical&rft.au=Dutronc,%20Pascale&rft.date=1992&rft.volume=6&rft.issue=1&rft.spage=279&rft.epage=284&rft.pages=279-284&rft.issn=0925-4005&rft.eissn=1873-3077&rft_id=info:doi/10.1016/0925-4005(92)80070-E&rft_dat=%3Celsevier_hal_p%3E092540059280070E%3C/elsevier_hal_p%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_els_id=092540059280070E&rfr_iscdi=true |