"Mechanisms involved in the transformation of ppHMDSO films into SiO2-like by oxygen plasma treatment"

Thin ppHMDSO plasma polymer films deposited in a low pressure hexamethyldisiloxane plasma have been exposed to oxygen plasmas ignited in the same reactor at different pressures. The time evolution of the ppHMDSO film during the oxygen plasma treatment (30 s to one hour) was monitored in situ bymulti...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Plasma processes and polymers 2006, Vol.3, p.365-373
Hauptverfasser:	Granier, Agnès A., Borvon, G., Bousquet, A., Goullet, Antoine, Leteinturier, C., van Der Lee, A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical Sciences
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!