Elnes study of carbon K-edge spectra of plasma deposited carbon films
Electron energy loss spectroscopy was used to investigate the bonding of plasma deposited carbon films. The experimental conditions include the use of a specific collection angle for which the shape of the spectra is free of the orientation dependency usually encountered in graphite due to its aniso...
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| Veröffentlicht in: | Journal of materials chemistry 2004-01, Vol.14 (13), p.2030-2035 |
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| container_end_page | 2035 |
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| container_issue | 13 |
| container_start_page | 2030 |
| container_title | Journal of materials chemistry |
| container_volume | 14 |
| creator | HAMON, Ann-Lenaig VERBEECK, Jo SCHRYVERS, Dominique BENEDIKT, Jan SANDEN, Richard M. C. M. V. D |
| description | Electron energy loss spectroscopy was used to investigate the bonding of plasma deposited carbon films. The experimental conditions include the use of a specific collection angle for which the shape of the spectra is free of the orientation dependency usually encountered in graphite due to its anisotropic structure. The first quantification process of the energy loss near-edge structure was performed by a standard fit of the collected spectrum, corrected for background and multiple scattering, with three Gaussian functions followed by a comparison with the graphite spectrum obtained under equivalent experimental conditions. In a second approach a fitting model directly incorporating the background subtraction and multiple scattering removal was applied. The final numerical results are interpreted in view of the deposition conditions of the films and the actual fitting procedure with the related choice of parameters. |
| doi_str_mv | 10.1039/b406468m |
| format | Article |
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C. M. V. D</creatorcontrib><title>Elnes study of carbon K-edge spectra of plasma deposited carbon films</title><title>Journal of materials chemistry</title><description>Electron energy loss spectroscopy was used to investigate the bonding of plasma deposited carbon films. The experimental conditions include the use of a specific collection angle for which the shape of the spectra is free of the orientation dependency usually encountered in graphite due to its anisotropic structure. The first quantification process of the energy loss near-edge structure was performed by a standard fit of the collected spectrum, corrected for background and multiple scattering, with three Gaussian functions followed by a comparison with the graphite spectrum obtained under equivalent experimental conditions. In a second approach a fitting model directly incorporating the background subtraction and multiple scattering removal was applied. The final numerical results are interpreted in view of the deposition conditions of the films and the actual fitting procedure with the related choice of parameters.</description><subject>Chemical Sciences</subject><subject>Condensed Matter</subject><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Electron and ion emission by liquids and solids; impact phenomena</subject><subject>Electron energy loss spectra</subject><subject>Exact sciences and technology</subject><subject>Impact phenomena (including electron spectra and sputtering)</subject><subject>Material chemistry</subject><subject>Materials Science</subject><subject>Methods of deposition of films and coatings; film growth and epitaxy</subject><subject>Physics</subject><issn>0959-9428</issn><issn>1364-5501</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2004</creationdate><recordtype>article</recordtype><recordid>eNpF0E1Lw0AQBuBFFKxV8CfkIughupv9PpbSWjHgRc9hsh8aSZqwE4X-extq9TQw88zAvIRcM3rPKLcPtaBKKNOdkBnjSuRSUnZKZtRKm1tRmHNygfhJKWNayRlZrdptwAzHL7_L-pg5SHW_zZ7z4N9DhkNwY4JpMLSAHWQ-DD02Y_BHGZu2w0tyFqHFcPVb5-RtvXpdbvLy5fFpuShzx7UccyWAB-_ACAtSexohMsWC0sZ7LeroJDNaFTJQ5SkHEaKoayOYibKIwDWfk7vD3Q9oqyE1HaRd1UNTbRZlNfXo_jFjNf9me3t7sC71iCnEvwVGqymq6hjVnt4c6ADooI0Jtq7Bfy-tNkpI_gMpeGdk</recordid><startdate>20040101</startdate><enddate>20040101</enddate><creator>HAMON, Ann-Lenaig</creator><creator>VERBEECK, Jo</creator><creator>SCHRYVERS, Dominique</creator><creator>BENEDIKT, Jan</creator><creator>SANDEN, Richard M. 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The experimental conditions include the use of a specific collection angle for which the shape of the spectra is free of the orientation dependency usually encountered in graphite due to its anisotropic structure. The first quantification process of the energy loss near-edge structure was performed by a standard fit of the collected spectrum, corrected for background and multiple scattering, with three Gaussian functions followed by a comparison with the graphite spectrum obtained under equivalent experimental conditions. In a second approach a fitting model directly incorporating the background subtraction and multiple scattering removal was applied. The final numerical results are interpreted in view of the deposition conditions of the films and the actual fitting procedure with the related choice of parameters.</abstract><cop>Cambridge</cop><pub>Royal Society of Chemistry</pub><doi>10.1039/b406468m</doi><tpages>6</tpages></addata></record> |
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| ispartof | Journal of materials chemistry, 2004-01, Vol.14 (13), p.2030-2035 |
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| source | Royal Society of Chemistry Journals Archive (1841-2007); Royal Society Of Chemistry Journals 2008- |
| subjects | Chemical Sciences Condensed Matter Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Electron and ion emission by liquids and solids impact phenomena Electron energy loss spectra Exact sciences and technology Impact phenomena (including electron spectra and sputtering) Material chemistry Materials Science Methods of deposition of films and coatings film growth and epitaxy Physics |
| title | Elnes study of carbon K-edge spectra of plasma deposited carbon films |
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