PbOx phase separation in PbZr0.52Ti0.48O3 based capacitors made using sol-gel films with high Pb precursor excess

We present a study of the impact of Pb excess content on electrical performance of lead zirconate titanate (PbZr0.52Ti0.48O3, PZT) thin-film capacitors. High Pb excess eliminates the ZrOx interface layer between the PZT and the electrode but also reduces the breakdown field, while the linear dielect...

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Veröffentlicht in:	Applied physics letters 2022-06, Vol.120 (24)
Hauptverfasser:	Gueye, Ibrahima, Le Rhun, Gwenael, Renault, Olivier, Pierre, Francois, Defay, Emmanuel, Barrett, Nicholas
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied physics Capacitors Dielectric breakdown Ferroelectric materials Ferroelectricity Lead zirconate titanates Phase separation Photoelectrons Physics Sol-gel processes Thin films
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