CASTOR, a new instrument for combined XRR‐GIXRF analysis at SOLEIL
A new instrument called CASTOR is operated at the SOLEIL synchrotron facility and is dedicated to the characterization of thin films with thicknesses in the nanometer range. The instrument can combine X‐ray reflectivity measurements with fluorescence (XRF) acquisitions and especially total reflectio...
Gespeichert in:
| Veröffentlicht in: | X-ray spectrometry 2017-09, Vol.46 (5), p.303-308 |
|---|---|
| Hauptverfasser: | , , , , , , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 308 |
|---|---|
| container_issue | 5 |
| container_start_page | 303 |
| container_title | X-ray spectrometry |
| container_volume | 46 |
| creator | Ménesguen, Y. Boyer, B. Rotella, H. Lubeck, J. Weser, J. Beckhoff, B. Grötzsch, D. Kanngießer, B. Novikova, A. Nolot, E. Lépy, M.‐C. |
| description | A new instrument called CASTOR is operated at the SOLEIL synchrotron facility and is dedicated to the characterization of thin films with thicknesses in the nanometer range. The instrument can combine X‐ray reflectivity measurements with fluorescence (XRF) acquisitions and especially total reflection X‐ray fluorescence‐related techniques such as grazing incidence XRF. The instrument was successfully installed and operated on the two branches of the metrology beamline making possible experiments over a wide range of photon energies (45 eV to 40 keV). A heating sample holder was developed to allow the sample temperature to be controlled up to 300° C. Some examples of the first studies are given to illustrate the capabilities of the setup. Copyright © 2017 John Wiley & Sons, Ltd. |
| doi_str_mv | 10.1002/xrs.2742 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_hal_p</sourceid><recordid>TN_cdi_hal_primary_oai_HAL_cea_01801603v1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>1929385293</sourcerecordid><originalsourceid>FETCH-LOGICAL-c3612-58a923792a5ca693ad056d323f4c6ac3c4d2a87e510777d95500cb894b5565383</originalsourceid><addsrcrecordid>eNp10N9KwzAUBvAgCs4p-AgBbxTsPEmatrkcc_-gMOgm7C5kaYodXTuTbnN3PoLP6JPYWfHOm3Nufnx8fAjdEugRAPr0bl2Phj49Qx0CIvR8zsQ56gD4wouoH1yiK-fWAAQIER30POjPF7PkEStcmgPOS1fb3caUNc4qi3W1WeWlSfEySb4-PsfTZTLCqlTF0eUOqxrPZ_FwGl-ji0wVztz8_i56GQ0Xg4kXz8bTQT_2NAsI9XikBGWhoIprFQimUuBByijLfB0ozbSfUhWFhhMIwzAVnAPoVST8FecBZxHrooc291UVcmvzjbJHWalcTvqx1EZJIBGQANieNPautVtbve2Mq-W62tmmupNEUMEi3pxG3bdK28o5a7K_WALytKds9pSnPRvqtfSQF-b4r5PLZP7jvwF1eHKg</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1929385293</pqid></control><display><type>article</type><title>CASTOR, a new instrument for combined XRR‐GIXRF analysis at SOLEIL</title><source>Wiley Online Library - AutoHoldings Journals</source><creator>Ménesguen, Y. ; Boyer, B. ; Rotella, H. ; Lubeck, J. ; Weser, J. ; Beckhoff, B. ; Grötzsch, D. ; Kanngießer, B. ; Novikova, A. ; Nolot, E. ; Lépy, M.‐C.</creator><creatorcontrib>Ménesguen, Y. ; Boyer, B. ; Rotella, H. ; Lubeck, J. ; Weser, J. ; Beckhoff, B. ; Grötzsch, D. ; Kanngießer, B. ; Novikova, A. ; Nolot, E. ; Lépy, M.‐C.</creatorcontrib><description>A new instrument called CASTOR is operated at the SOLEIL synchrotron facility and is dedicated to the characterization of thin films with thicknesses in the nanometer range. The instrument can combine X‐ray reflectivity measurements with fluorescence (XRF) acquisitions and especially total reflection X‐ray fluorescence‐related techniques such as grazing incidence XRF. The instrument was successfully installed and operated on the two branches of the metrology beamline making possible experiments over a wide range of photon energies (45 eV to 40 keV). A heating sample holder was developed to allow the sample temperature to be controlled up to 300° C. Some examples of the first studies are given to illustrate the capabilities of the setup. Copyright © 2017 John Wiley & Sons, Ltd.</description><identifier>ISSN: 0049-8246</identifier><identifier>EISSN: 1097-4539</identifier><identifier>DOI: 10.1002/xrs.2742</identifier><language>eng</language><publisher>Chichester, UK: John Wiley & Sons, Ltd</publisher><subject>Atomic Physics ; Engineering Sciences ; Fluorescence ; Grazing incidence ; Instrumentation and Detectors ; Metrology ; Nuclear Experiment ; Optics ; Photonic ; Physics ; Special Issue ; Thin films ; X ray reflection ; X-ray fluorescence ; X-rays</subject><ispartof>X-ray spectrometry, 2017-09, Vol.46 (5), p.303-308</ispartof><rights>Copyright © 2017 John Wiley & Sons, Ltd.</rights><rights>Distributed under a Creative Commons Attribution 4.0 International License</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c3612-58a923792a5ca693ad056d323f4c6ac3c4d2a87e510777d95500cb894b5565383</citedby><cites>FETCH-LOGICAL-c3612-58a923792a5ca693ad056d323f4c6ac3c4d2a87e510777d95500cb894b5565383</cites><orcidid>0000-0003-2505-979X ; 0000-0002-6421-1419</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://onlinelibrary.wiley.com/doi/pdf/10.1002%2Fxrs.2742$$EPDF$$P50$$Gwiley$$H</linktopdf><linktohtml>$$Uhttps://onlinelibrary.wiley.com/doi/full/10.1002%2Fxrs.2742$$EHTML$$P50$$Gwiley$$H</linktohtml><link.rule.ids>230,314,780,784,885,1416,27922,27923,45572,45573</link.rule.ids><backlink>$$Uhttps://cea.hal.science/cea-01801603$$DView record in HAL$$Hfree_for_read</backlink></links><search><creatorcontrib>Ménesguen, Y.</creatorcontrib><creatorcontrib>Boyer, B.</creatorcontrib><creatorcontrib>Rotella, H.</creatorcontrib><creatorcontrib>Lubeck, J.</creatorcontrib><creatorcontrib>Weser, J.</creatorcontrib><creatorcontrib>Beckhoff, B.</creatorcontrib><creatorcontrib>Grötzsch, D.</creatorcontrib><creatorcontrib>Kanngießer, B.</creatorcontrib><creatorcontrib>Novikova, A.</creatorcontrib><creatorcontrib>Nolot, E.</creatorcontrib><creatorcontrib>Lépy, M.‐C.</creatorcontrib><title>CASTOR, a new instrument for combined XRR‐GIXRF analysis at SOLEIL</title><title>X-ray spectrometry</title><description>A new instrument called CASTOR is operated at the SOLEIL synchrotron facility and is dedicated to the characterization of thin films with thicknesses in the nanometer range. The instrument can combine X‐ray reflectivity measurements with fluorescence (XRF) acquisitions and especially total reflection X‐ray fluorescence‐related techniques such as grazing incidence XRF. The instrument was successfully installed and operated on the two branches of the metrology beamline making possible experiments over a wide range of photon energies (45 eV to 40 keV). A heating sample holder was developed to allow the sample temperature to be controlled up to 300° C. Some examples of the first studies are given to illustrate the capabilities of the setup. Copyright © 2017 John Wiley & Sons, Ltd.</description><subject>Atomic Physics</subject><subject>Engineering Sciences</subject><subject>Fluorescence</subject><subject>Grazing incidence</subject><subject>Instrumentation and Detectors</subject><subject>Metrology</subject><subject>Nuclear Experiment</subject><subject>Optics</subject><subject>Photonic</subject><subject>Physics</subject><subject>Special Issue</subject><subject>Thin films</subject><subject>X ray reflection</subject><subject>X-ray fluorescence</subject><subject>X-rays</subject><issn>0049-8246</issn><issn>1097-4539</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2017</creationdate><recordtype>article</recordtype><recordid>eNp10N9KwzAUBvAgCs4p-AgBbxTsPEmatrkcc_-gMOgm7C5kaYodXTuTbnN3PoLP6JPYWfHOm3Nufnx8fAjdEugRAPr0bl2Phj49Qx0CIvR8zsQ56gD4wouoH1yiK-fWAAQIER30POjPF7PkEStcmgPOS1fb3caUNc4qi3W1WeWlSfEySb4-PsfTZTLCqlTF0eUOqxrPZ_FwGl-ji0wVztz8_i56GQ0Xg4kXz8bTQT_2NAsI9XikBGWhoIprFQimUuBByijLfB0ozbSfUhWFhhMIwzAVnAPoVST8FecBZxHrooc291UVcmvzjbJHWalcTvqx1EZJIBGQANieNPautVtbve2Mq-W62tmmupNEUMEi3pxG3bdK28o5a7K_WALytKds9pSnPRvqtfSQF-b4r5PLZP7jvwF1eHKg</recordid><startdate>201709</startdate><enddate>201709</enddate><creator>Ménesguen, Y.</creator><creator>Boyer, B.</creator><creator>Rotella, H.</creator><creator>Lubeck, J.</creator><creator>Weser, J.</creator><creator>Beckhoff, B.</creator><creator>Grötzsch, D.</creator><creator>Kanngießer, B.</creator><creator>Novikova, A.</creator><creator>Nolot, E.</creator><creator>Lépy, M.‐C.</creator><general>John Wiley & Sons, Ltd</general><general>Wiley Subscription Services, Inc</general><general>Wiley</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>JQ2</scope><scope>L7M</scope><scope>1XC</scope><scope>VOOES</scope><orcidid>https://orcid.org/0000-0003-2505-979X</orcidid><orcidid>https://orcid.org/0000-0002-6421-1419</orcidid></search><sort><creationdate>201709</creationdate><title>CASTOR, a new instrument for combined XRR‐GIXRF analysis at SOLEIL</title><author>Ménesguen, Y. ; Boyer, B. ; Rotella, H. ; Lubeck, J. ; Weser, J. ; Beckhoff, B. ; Grötzsch, D. ; Kanngießer, B. ; Novikova, A. ; Nolot, E. ; Lépy, M.‐C.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c3612-58a923792a5ca693ad056d323f4c6ac3c4d2a87e510777d95500cb894b5565383</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2017</creationdate><topic>Atomic Physics</topic><topic>Engineering Sciences</topic><topic>Fluorescence</topic><topic>Grazing incidence</topic><topic>Instrumentation and Detectors</topic><topic>Metrology</topic><topic>Nuclear Experiment</topic><topic>Optics</topic><topic>Photonic</topic><topic>Physics</topic><topic>Special Issue</topic><topic>Thin films</topic><topic>X ray reflection</topic><topic>X-ray fluorescence</topic><topic>X-rays</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Ménesguen, Y.</creatorcontrib><creatorcontrib>Boyer, B.</creatorcontrib><creatorcontrib>Rotella, H.</creatorcontrib><creatorcontrib>Lubeck, J.</creatorcontrib><creatorcontrib>Weser, J.</creatorcontrib><creatorcontrib>Beckhoff, B.</creatorcontrib><creatorcontrib>Grötzsch, D.</creatorcontrib><creatorcontrib>Kanngießer, B.</creatorcontrib><creatorcontrib>Novikova, A.</creatorcontrib><creatorcontrib>Nolot, E.</creatorcontrib><creatorcontrib>Lépy, M.‐C.</creatorcontrib><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>ProQuest Computer Science Collection</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Hyper Article en Ligne (HAL)</collection><collection>Hyper Article en Ligne (HAL) (Open Access)</collection><jtitle>X-ray spectrometry</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Ménesguen, Y.</au><au>Boyer, B.</au><au>Rotella, H.</au><au>Lubeck, J.</au><au>Weser, J.</au><au>Beckhoff, B.</au><au>Grötzsch, D.</au><au>Kanngießer, B.</au><au>Novikova, A.</au><au>Nolot, E.</au><au>Lépy, M.‐C.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>CASTOR, a new instrument for combined XRR‐GIXRF analysis at SOLEIL</atitle><jtitle>X-ray spectrometry</jtitle><date>2017-09</date><risdate>2017</risdate><volume>46</volume><issue>5</issue><spage>303</spage><epage>308</epage><pages>303-308</pages><issn>0049-8246</issn><eissn>1097-4539</eissn><abstract>A new instrument called CASTOR is operated at the SOLEIL synchrotron facility and is dedicated to the characterization of thin films with thicknesses in the nanometer range. The instrument can combine X‐ray reflectivity measurements with fluorescence (XRF) acquisitions and especially total reflection X‐ray fluorescence‐related techniques such as grazing incidence XRF. The instrument was successfully installed and operated on the two branches of the metrology beamline making possible experiments over a wide range of photon energies (45 eV to 40 keV). A heating sample holder was developed to allow the sample temperature to be controlled up to 300° C. Some examples of the first studies are given to illustrate the capabilities of the setup. Copyright © 2017 John Wiley & Sons, Ltd.</abstract><cop>Chichester, UK</cop><pub>John Wiley & Sons, Ltd</pub><doi>10.1002/xrs.2742</doi><tpages>6</tpages><orcidid>https://orcid.org/0000-0003-2505-979X</orcidid><orcidid>https://orcid.org/0000-0002-6421-1419</orcidid><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0049-8246 |
| ispartof | X-ray spectrometry, 2017-09, Vol.46 (5), p.303-308 |
| issn | 0049-8246 1097-4539 |
| language | eng |
| recordid | cdi_hal_primary_oai_HAL_cea_01801603v1 |
| source | Wiley Online Library - AutoHoldings Journals |
| subjects | Atomic Physics Engineering Sciences Fluorescence Grazing incidence Instrumentation and Detectors Metrology Nuclear Experiment Optics Photonic Physics Special Issue Thin films X ray reflection X-ray fluorescence X-rays |
| title | CASTOR, a new instrument for combined XRR‐GIXRF analysis at SOLEIL |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-14T12%3A26%3A13IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_hal_p&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=CASTOR,%20a%20new%20instrument%20for%20combined%20XRR%E2%80%90GIXRF%20analysis%20at%20SOLEIL&rft.jtitle=X-ray%20spectrometry&rft.au=M%C3%A9nesguen,%20Y.&rft.date=2017-09&rft.volume=46&rft.issue=5&rft.spage=303&rft.epage=308&rft.pages=303-308&rft.issn=0049-8246&rft.eissn=1097-4539&rft_id=info:doi/10.1002/xrs.2742&rft_dat=%3Cproquest_hal_p%3E1929385293%3C/proquest_hal_p%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=1929385293&rft_id=info:pmid/&rfr_iscdi=true |