Subsurface damage distribution characterization of ground surfaces using Abbott-Firestone curves

Subsurface damage distribution characterization of ground surfaces using Abbott-Firestone curves

Measurement of subsurface damage (SSD) induced by grinding process is of major interest in the development of high laser damage fused silica optical components manufacturing processes. Most SSD measurements methods give only access to the peak to peak value. We herein report on the benefit of using...

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Veröffentlicht in:Optics express 2012-06, Vol.20 (12), p.13551-13559
Hauptverfasser: Laheurte, Raynald, Darnis, Philippe, Darbois, Nathalie, Cahuc, Olivier, Neauport, Jérôme
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container_issue 12
container_start_page 13551
container_title Optics express
container_volume 20
creator Laheurte, Raynald
Darnis, Philippe
Darbois, Nathalie
Cahuc, Olivier
Neauport, Jérôme
description Measurement of subsurface damage (SSD) induced by grinding process is of major interest in the development of high laser damage fused silica optical components manufacturing processes. Most SSD measurements methods give only access to the peak to peak value. We herein report on the benefit of using Abbott-Firestone curves to get an insight of the SSD distribution inside the optical material. We evidence on various diamond wheel ground fused silica substrates that such an approach is complementary to a classical SSD peak to peak measurement and bring useful information to optimize a grinding process.
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subjects Optics
Physics
title Subsurface damage distribution characterization of ground surfaces using Abbott-Firestone curves
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