Optical and Electrophysical Properties of Thin Zinc Oxide Films Doped with Scandium and Obtained by Laser Deposition

Nanostructured thin films on a silicon substrate were obtained by high-frequency pulse-periodic laser action (f ~ 10–15 kHz) with wavelength λ = 1.064 μm and power density q = 85 MW/cm 2 on zinc oxide ceramic doped with scandium oxide in a vacuum chamber with pressure p = 2·10 –2 mm Hg. The morpholo...

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Veröffentlicht in:	Journal of applied spectroscopy 2020-11, Vol.87 (5), p.840-845
Hauptverfasser:	Bosak, N. A., Chumakov, A. N., Shevchenok, A. A., Baran, L. V., Karoza, A. G., Malutina-Bronskaya, V. V., Raichenok, T. F., Sugak, M. G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Analytical Chemistry Atomic/Molecular Structure and Spectra Ceramic materials Ceramics Dielectric films Physics Physics and Astronomy Rare earth metals Thin films Zinc oxide
Online-Zugang:	Volltext
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