Effect of Microwave Annealing on the Sensing Characteristics of HfO[sub.2] Thin Film for High Sensitive pH-EGFET Sensor

Recently, certain challenges have persisted in PH sensor applications, especially when employing hafnium oxide (HfO[sub.2]) thin films as sensing layers, where issues related to sensitivity, hysteresis, and long-term stability hamper performance. Microwave annealing (MWA) technology, as a promising...

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Veröffentlicht in:	Micromachines (Basel) 2023-09, Vol.14 (10)
Hauptverfasser:	Cui, Siwei, Yang, Hui, Zhang, Yifei, Su, Xing, Wu, Dongping
Format:	Artikel
Sprache:	eng
Schlagworte:	Annealing Field-effect transistors Hydrogen-ion concentration Sensors
Online-Zugang:	Volltext
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