Impact of Hydrogen Plasma on Electrical Properties and Deep Trap Spectra in Ga[sub.2]O[sub.3] Polymorphs

In this study, the results of hydrogen plasma treatments of β-Ga[sub.2]O[sub.3], α-Ga[sub.2]O[sub.3], κ-Ga[sub.2]O[sub.3] and γ-Ga[sub.2]O[sub.3] polymorphs are analyzed. For all polymorphs, the results strongly suggest an interplay between donor-like hydrogen configurations and acceptor complexes f...

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Veröffentlicht in:	Crystals (Basel) 2023-09, Vol.13 (9)
Hauptverfasser:	Polyakov, Alexander Y, Yakimov, Eugene B, Nikolaev, Vladimir I, Pechnikov, Alexei I, Miakonkikh, Andrej V, Azarov, Alexander, Lee, In-Hwan, Vasilev, Anton A, Kochkova, Anastasiia I, Shchemerov, Ivan V, Kuznetsov, Andrej, Pearton, Stephen J
Format:	Artikel
Sprache:	eng
Schlagworte:	Crystals Electric properties Electrical conductivity Field-effect transistors Hydrogen Structure
Online-Zugang:	Volltext
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