Features of Metalorganic Chemical Vapor Deposition Selective Area Epitaxy of Al[sub.z]Ga[sub.1−z]As Layers in Arrays of Ultrawide Windows

Al[sub.z] Ga[sub.1−z] As layers of various compositions were grown using metalorganic chemical vapor deposition on a GaAs substrate with a pattern of alternating SiO[sub.2] mask/window stripes, each 100 µm wide. Microphotoluminescence maps and thickness profiles of Al[sub.z] Ga[sub.1−z] As layers th...

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Veröffentlicht in:	Technologies (Basel) 2023-07, Vol.11 (4)
Hauptverfasser:	Shamakhov, Viktor, Slipchenko, Sergey, Nikolaev, Dmitriy, Soshnikov, Ilya, Smirnov, Alexander, Eliseyev, Ilya, Grishin, Artyom, Kondratov, Matvei, Rizaev, Artem, Pikhtin, Nikita, Kop'ev, Peter
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum compounds Chemical vapor deposition Design and construction Epitaxy Materials Windows
Online-Zugang:	Volltext
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