Effects of Oxygen Flow Rate on Metal-to-Insulator Transition Characteristics in NbO[sub.x]-Based Selectors

In this work, NbOx-based selector devices were fabricated by sputtering deposition systems. Metal-to-insulator transition characteristics of the device samples were investigated depending on the oxygen flow rate (3.5, 4.5, and 5.5 sccm) and the deposition time. The device stack was scanned by transm...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Materials 2022-12, Vol.15 (23)
Hauptverfasser:	Kwon, Osung, Lee, Hongmin, Kim, Sungjun
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical properties Electric properties Materials research Niobium Oxygen Phase transformations (Statistical physics)
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!