Optical monitoring of the deposition process of ferroelectric films

A method of optical monitoring of deposition of ferroelectric Ba 0.8 Sr 0.2 TiO 3 films grown by high-frequency reactive plasma-enhanced chemical deposition has been considered. The studies of the plasma in the optical range have demonstrated that the emission spectrum at wavelengths λ > 450 nm i...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Physics of the solid state 2015-07, Vol.57 (7), p.1377-1380
Hauptverfasser:	Afanas’ev, M. S., Nabiev, A. E., Chucheva, G. V.
Format:	Artikel
Sprache:	eng
Schlagworte:	Ferroelectricity Motion pictures Physics Physics and Astronomy Solid State Physics
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!