Capacitor structures based on strontium titanate films
The structural properties of strontium titanate films and the electrical parameters of the related capacitor structures have been investigated. It has been found that the deposition temperature exerts a direct effect on the phase composition of the films, the degree of perfection of the crystal stru...
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| Veröffentlicht in: | Physics of the solid state 2012-05, Vol.54 (5), p.968-971 |
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| container_issue | 5 |
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| container_title | Physics of the solid state |
| container_volume | 54 |
| creator | Tumarkin, A. V. Gaidukov, M. M. Razumov, S. V. Gagarin, A. G. |
| description | The structural properties of strontium titanate films and the electrical parameters of the related capacitor structures have been investigated. It has been found that the deposition temperature exerts a direct effect on the phase composition of the films, the degree of perfection of the crystal structure, and the internal stresses in the lattice. The strontium titanate films deposited at a temperature of 800°C are single-phase, have a rather perfect crystal structure, and possess minimum internal stresses. It has been shown that the capacitor structures based on oriented strontium titanate films provide a twofold decrease in the level of dielectric loss as compared to similar structures based on barium strontium titanate solid solution films at a frequency of 1.5 GHz. |
| doi_str_mv | 10.1134/S1063783412050435 |
| format | Article |
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It has been shown that the capacitor structures based on oriented strontium titanate films provide a twofold decrease in the level of dielectric loss as compared to similar structures based on barium strontium titanate solid solution films at a frequency of 1.5 GHz.</description><identifier>ISSN: 1063-7834</identifier><identifier>EISSN: 1090-6460</identifier><identifier>DOI: 10.1134/S1063783412050435</identifier><language>eng</language><publisher>Dordrecht: SP MAIK Nauka/Interperiodica</publisher><subject>Capacitors ; Crystals ; Electronic components industry ; Physics ; Physics and Astronomy ; Proceedings of the XIX All-Russian Conference on Physics of Ferroelectrics (VKS-XIX) ; Solid State Physics ; Strontium ; Structure</subject><ispartof>Physics of the solid state, 2012-05, Vol.54 (5), p.968-971</ispartof><rights>Pleiades Publishing, Ltd. 2012</rights><rights>COPYRIGHT 2012 Springer</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c361t-29203d151d88be425b5bfd20c895f2133a9df6f2473887654844f76591cdceb83</citedby><cites>FETCH-LOGICAL-c361t-29203d151d88be425b5bfd20c895f2133a9df6f2473887654844f76591cdceb83</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1134/S1063783412050435$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1134/S1063783412050435$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,776,780,27903,27904,41467,42536,51297</link.rule.ids></links><search><creatorcontrib>Tumarkin, A. 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It has been shown that the capacitor structures based on oriented strontium titanate films provide a twofold decrease in the level of dielectric loss as compared to similar structures based on barium strontium titanate solid solution films at a frequency of 1.5 GHz.</description><subject>Capacitors</subject><subject>Crystals</subject><subject>Electronic components industry</subject><subject>Physics</subject><subject>Physics and Astronomy</subject><subject>Proceedings of the XIX All-Russian Conference on Physics of Ferroelectrics (VKS-XIX)</subject><subject>Solid State Physics</subject><subject>Strontium</subject><subject>Structure</subject><issn>1063-7834</issn><issn>1090-6460</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2012</creationdate><recordtype>article</recordtype><recordid>eNp9UE1LAzEQDaJgXf0B3vbqYWsmX80eS_GjUBCsnkM2m5SU7m5JsqD_3iz1UgSZwxtm3ps3PITuAc8BKHvcAhZ0ISkDgjlmlF-gGeAaV4IJfDn1glbT_hrdxLjHGAB4PUNipY_a-DSEMqYwmjQGG8tGR9uWQz_Nhj75sSuTT7rXyZbOH7p4i66cPkR794sF-nx--li9Vpu3l_VquakMFZAqUhNMW-DQStlYRnjDG9cSbGTNHQFKdd064QhbUCkXgjPJmMtYg2mNbSQt0Px0d6cPVvneDSlok6u1nTdDb_M3Vi2zGeeEZrMCPZwJMifZr7TTY4xqvX0_58KJa8IQY7BOHYPvdPhWgNWUqvqTataQkyZmbr-zQe2HMfQ5g39EP1sJdvo</recordid><startdate>20120501</startdate><enddate>20120501</enddate><creator>Tumarkin, A. 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| source | Springer Nature - Complete Springer Journals |
| subjects | Capacitors Crystals Electronic components industry Physics Physics and Astronomy Proceedings of the XIX All-Russian Conference on Physics of Ferroelectrics (VKS-XIX) Solid State Physics Strontium Structure |
| title | Capacitor structures based on strontium titanate films |
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