Diamond direct and inverse opal matrices produced by chemical vapor deposition

Diamond structures with inverse and direct three-dimensional opal lattices with period of 250–530 nm were grown by microwave plasma deposition in methane-hydrogen mixtures using porous SiO 2 opal matrix and its Si replica as templates, respectively. The Si templates can be filled with diamond to the...

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Veröffentlicht in:Physics of the solid state 2011-06, Vol.53 (6), p.1131-1134
Hauptverfasser: Ralchenko, V. G., Sovyk, D. N., Bolshakov, A. P., Homich, A. A., Vlasov, I. I., Kurdyukov, D. A., Golubev, V. G., Zakhidov, A. A.
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Sprache:eng
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Zusammenfassung:Diamond structures with inverse and direct three-dimensional opal lattices with period of 250–530 nm were grown by microwave plasma deposition in methane-hydrogen mixtures using porous SiO 2 opal matrix and its Si replica as templates, respectively. The Si templates can be filled with diamond to the depth as large as 80 layers of the spheres.
ISSN:1063-7834
1090-6460
DOI:10.1134/S106378341106028X