Diamond direct and inverse opal matrices produced by chemical vapor deposition
Diamond structures with inverse and direct three-dimensional opal lattices with period of 250–530 nm were grown by microwave plasma deposition in methane-hydrogen mixtures using porous SiO 2 opal matrix and its Si replica as templates, respectively. The Si templates can be filled with diamond to the...
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Veröffentlicht in: | Physics of the solid state 2011-06, Vol.53 (6), p.1131-1134 |
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Hauptverfasser: | , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Diamond structures with inverse and direct three-dimensional opal lattices with period of 250–530 nm were grown by microwave plasma deposition in methane-hydrogen mixtures using porous SiO
2
opal matrix and its Si replica as templates, respectively. The Si templates can be filled with diamond to the depth as large as 80 layers of the spheres. |
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ISSN: | 1063-7834 1090-6460 |
DOI: | 10.1134/S106378341106028X |