Updating of the toroidal electron spectrometer intended for a scanning electron microscope and its new applications in diagnostics of micro- and nanoelectronic structures

A new version of the toroidal electron spectrometer installed in a scanning electron microscope is described. The new instrument has made it possible to carry out fundamental and applied research in the field of local nondestructive inspection of micro- and nanoelectronic materials and devices. The...

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Veröffentlicht in:	Technical physics 2013-03, Vol.58 (3), p.447-454
Hauptverfasser:	Gostev, A. V., Orlikovskii, N. A., Rau, E. I., Trubitsyn, A. A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Classical and Continuum Physics Experimental Instruments and Technique Invisibility Nanotechnology Physics Physics and Astronomy Semiconductors
Online-Zugang:	Volltext
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