Updating of the toroidal electron spectrometer intended for a scanning electron microscope and its new applications in diagnostics of micro- and nanoelectronic structures
A new version of the toroidal electron spectrometer installed in a scanning electron microscope is described. The new instrument has made it possible to carry out fundamental and applied research in the field of local nondestructive inspection of micro- and nanoelectronic materials and devices. The...
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| Veröffentlicht in: | Technical physics 2013-03, Vol.58 (3), p.447-454 |
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| container_title | Technical physics |
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| creator | Gostev, A. V. Orlikovskii, N. A. Rau, E. I. Trubitsyn, A. A. |
| description | A new version of the toroidal electron spectrometer installed in a scanning electron microscope is described. The new instrument has made it possible to carry out fundamental and applied research in the field of local nondestructive inspection of micro- and nanoelectronic materials and devices. The topology control of 3D microstructures by backscattered electron tomography is exemplified. A high efficiency of secondary electron energy filtering in monitoring of semiconductor regions locally doped by
p
- and
n
-type impurities is demonstrated. A physical substantiation for the high contrast of the doped regions is given. The feasibility of taking electron spectra using a scanning electron microscope in a wide range from slow secondary electrons to elastically scattered ones is proved. |
| doi_str_mv | 10.1134/S1063784213030109 |
| format | Article |
| fullrecord | <record><control><sourceid>gale_cross</sourceid><recordid>TN_cdi_gale_infotracacademiconefile_A335973611</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><galeid>A335973611</galeid><sourcerecordid>A335973611</sourcerecordid><originalsourceid>FETCH-LOGICAL-c327t-847bdf86d275e44ec360f6aeaea9edec99f739c8970b8839a54a9e9e6b802e5a3</originalsourceid><addsrcrecordid>eNp9kc1OAyEQx4nRxFp9AG-8wCosu-xybBq_kiYetOcNhWGl2cIGaIyv5FPKturFxEwCE2Z-_5lhELqm5IZSVt2-UMJZ01YlZYQRSsQJmuWTFLwu69PJ56yY4ufoIsYtIZS2NZ-hz_WoZbKux97g9AY4-eCtlgOGAVQK3uE4HpwdJAjYugROg8bGByxxVNK5if7N3lkVfFR-BCydxjZF7OAdy3EcrMqVvItZBGsre-djsipOlQ9UcSCcdP5HzSocU9irtA8QL9GZkUOEq-97jtb3d6_Lx2L1_PC0XKwKxcomFW3VbLRpuS6bGqoKFOPEcAnZBGhQQpiGCdWKhmzalglZVzkggG9aUkIt2RzdHHV7OUBnnfEpSJVNQ27TOzA2vy8Yq0XDeP79OaJHYJo8BjDdGOxOho-Okm7aTvdnO5kpj0zMua6H0G39Prg81z_QF9P7lrc</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Updating of the toroidal electron spectrometer intended for a scanning electron microscope and its new applications in diagnostics of micro- and nanoelectronic structures</title><source>SpringerLink</source><creator>Gostev, A. V. ; Orlikovskii, N. A. ; Rau, E. I. ; Trubitsyn, A. A.</creator><creatorcontrib>Gostev, A. V. ; Orlikovskii, N. A. ; Rau, E. I. ; Trubitsyn, A. A.</creatorcontrib><description>A new version of the toroidal electron spectrometer installed in a scanning electron microscope is described. The new instrument has made it possible to carry out fundamental and applied research in the field of local nondestructive inspection of micro- and nanoelectronic materials and devices. The topology control of 3D microstructures by backscattered electron tomography is exemplified. A high efficiency of secondary electron energy filtering in monitoring of semiconductor regions locally doped by
p
- and
n
-type impurities is demonstrated. A physical substantiation for the high contrast of the doped regions is given. The feasibility of taking electron spectra using a scanning electron microscope in a wide range from slow secondary electrons to elastically scattered ones is proved.</description><identifier>ISSN: 1063-7842</identifier><identifier>EISSN: 1090-6525</identifier><identifier>DOI: 10.1134/S1063784213030109</identifier><language>eng</language><publisher>Dordrecht: SP MAIK Nauka/Interperiodica</publisher><subject>Classical and Continuum Physics ; Experimental Instruments and Technique ; Invisibility ; Nanotechnology ; Physics ; Physics and Astronomy ; Semiconductors</subject><ispartof>Technical physics, 2013-03, Vol.58 (3), p.447-454</ispartof><rights>Pleiades Publishing, Ltd. 2013</rights><rights>COPYRIGHT 2013 Springer</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c327t-847bdf86d275e44ec360f6aeaea9edec99f739c8970b8839a54a9e9e6b802e5a3</citedby><cites>FETCH-LOGICAL-c327t-847bdf86d275e44ec360f6aeaea9edec99f739c8970b8839a54a9e9e6b802e5a3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1134/S1063784213030109$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1134/S1063784213030109$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,777,781,27905,27906,41469,42538,51300</link.rule.ids></links><search><creatorcontrib>Gostev, A. V.</creatorcontrib><creatorcontrib>Orlikovskii, N. A.</creatorcontrib><creatorcontrib>Rau, E. I.</creatorcontrib><creatorcontrib>Trubitsyn, A. A.</creatorcontrib><title>Updating of the toroidal electron spectrometer intended for a scanning electron microscope and its new applications in diagnostics of micro- and nanoelectronic structures</title><title>Technical physics</title><addtitle>Tech. Phys</addtitle><description>A new version of the toroidal electron spectrometer installed in a scanning electron microscope is described. The new instrument has made it possible to carry out fundamental and applied research in the field of local nondestructive inspection of micro- and nanoelectronic materials and devices. The topology control of 3D microstructures by backscattered electron tomography is exemplified. A high efficiency of secondary electron energy filtering in monitoring of semiconductor regions locally doped by
p
- and
n
-type impurities is demonstrated. A physical substantiation for the high contrast of the doped regions is given. The feasibility of taking electron spectra using a scanning electron microscope in a wide range from slow secondary electrons to elastically scattered ones is proved.</description><subject>Classical and Continuum Physics</subject><subject>Experimental Instruments and Technique</subject><subject>Invisibility</subject><subject>Nanotechnology</subject><subject>Physics</subject><subject>Physics and Astronomy</subject><subject>Semiconductors</subject><issn>1063-7842</issn><issn>1090-6525</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><recordid>eNp9kc1OAyEQx4nRxFp9AG-8wCosu-xybBq_kiYetOcNhWGl2cIGaIyv5FPKturFxEwCE2Z-_5lhELqm5IZSVt2-UMJZ01YlZYQRSsQJmuWTFLwu69PJ56yY4ufoIsYtIZS2NZ-hz_WoZbKux97g9AY4-eCtlgOGAVQK3uE4HpwdJAjYugROg8bGByxxVNK5if7N3lkVfFR-BCydxjZF7OAdy3EcrMqVvItZBGsre-djsipOlQ9UcSCcdP5HzSocU9irtA8QL9GZkUOEq-97jtb3d6_Lx2L1_PC0XKwKxcomFW3VbLRpuS6bGqoKFOPEcAnZBGhQQpiGCdWKhmzalglZVzkggG9aUkIt2RzdHHV7OUBnnfEpSJVNQ27TOzA2vy8Yq0XDeP79OaJHYJo8BjDdGOxOho-Okm7aTvdnO5kpj0zMua6H0G39Prg81z_QF9P7lrc</recordid><startdate>20130301</startdate><enddate>20130301</enddate><creator>Gostev, A. V.</creator><creator>Orlikovskii, N. A.</creator><creator>Rau, E. I.</creator><creator>Trubitsyn, A. A.</creator><general>SP MAIK Nauka/Interperiodica</general><general>Springer</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20130301</creationdate><title>Updating of the toroidal electron spectrometer intended for a scanning electron microscope and its new applications in diagnostics of micro- and nanoelectronic structures</title><author>Gostev, A. V. ; Orlikovskii, N. A. ; Rau, E. I. ; Trubitsyn, A. A.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c327t-847bdf86d275e44ec360f6aeaea9edec99f739c8970b8839a54a9e9e6b802e5a3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2013</creationdate><topic>Classical and Continuum Physics</topic><topic>Experimental Instruments and Technique</topic><topic>Invisibility</topic><topic>Nanotechnology</topic><topic>Physics</topic><topic>Physics and Astronomy</topic><topic>Semiconductors</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Gostev, A. V.</creatorcontrib><creatorcontrib>Orlikovskii, N. A.</creatorcontrib><creatorcontrib>Rau, E. I.</creatorcontrib><creatorcontrib>Trubitsyn, A. A.</creatorcontrib><collection>CrossRef</collection><jtitle>Technical physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Gostev, A. V.</au><au>Orlikovskii, N. A.</au><au>Rau, E. I.</au><au>Trubitsyn, A. A.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Updating of the toroidal electron spectrometer intended for a scanning electron microscope and its new applications in diagnostics of micro- and nanoelectronic structures</atitle><jtitle>Technical physics</jtitle><stitle>Tech. Phys</stitle><date>2013-03-01</date><risdate>2013</risdate><volume>58</volume><issue>3</issue><spage>447</spage><epage>454</epage><pages>447-454</pages><issn>1063-7842</issn><eissn>1090-6525</eissn><abstract>A new version of the toroidal electron spectrometer installed in a scanning electron microscope is described. The new instrument has made it possible to carry out fundamental and applied research in the field of local nondestructive inspection of micro- and nanoelectronic materials and devices. The topology control of 3D microstructures by backscattered electron tomography is exemplified. A high efficiency of secondary electron energy filtering in monitoring of semiconductor regions locally doped by
p
- and
n
-type impurities is demonstrated. A physical substantiation for the high contrast of the doped regions is given. The feasibility of taking electron spectra using a scanning electron microscope in a wide range from slow secondary electrons to elastically scattered ones is proved.</abstract><cop>Dordrecht</cop><pub>SP MAIK Nauka/Interperiodica</pub><doi>10.1134/S1063784213030109</doi><tpages>8</tpages></addata></record> |
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| ispartof | Technical physics, 2013-03, Vol.58 (3), p.447-454 |
| issn | 1063-7842 1090-6525 |
| language | eng |
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| source | SpringerLink |
| subjects | Classical and Continuum Physics Experimental Instruments and Technique Invisibility Nanotechnology Physics Physics and Astronomy Semiconductors |
| title | Updating of the toroidal electron spectrometer intended for a scanning electron microscope and its new applications in diagnostics of micro- and nanoelectronic structures |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-17T15%3A19%3A29IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-gale_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Updating%20of%20the%20toroidal%20electron%20spectrometer%20intended%20for%20a%20scanning%20electron%20microscope%20and%20its%20new%20applications%20in%20diagnostics%20of%20micro-%20and%20nanoelectronic%20structures&rft.jtitle=Technical%20physics&rft.au=Gostev,%20A.%20V.&rft.date=2013-03-01&rft.volume=58&rft.issue=3&rft.spage=447&rft.epage=454&rft.pages=447-454&rft.issn=1063-7842&rft.eissn=1090-6525&rft_id=info:doi/10.1134/S1063784213030109&rft_dat=%3Cgale_cross%3EA335973611%3C/gale_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_galeid=A335973611&rfr_iscdi=true |