Verfahren und Einrichtung zur optischen Erfassung eines Fluiddots auf einem Substrat

The method involves directing an optical measurement beam on to the area of application of the fluid dot (2) and recording its reflection and scatter. The area of application of a fluid dot at a number of measurement points is detected with an opto-electronic detector panel (9) having multiple structured sectors. A stationary, focussed optical measurement beam together with a geometrically structured detector panel section can be assigned to the measurement points. The application area can be scanned by three stationary, focussed measurement beams spaced 120 degrees apart and the intensity and/or position and/or spatial distribution of the reflected beams detected by three detector panel sections spaced 120 degrees apart. USE/ADVANTAGE - For checking correct dispensing of paste type materials in production of micro-assemblies e.g. micro-electronic, mechanical or optical assemblies. Permits by simple means immediate and precise assessment of dispensed fluid dots with insignificant delay to process, enabling immediate correction of faults.