Large Area TOPCon Cells Realized by a PECVD Tube Process
TOPCon is an appealing choice for next-generation solar cells as it minimizes surface recombination, enables low contact resistivities, and provides high thermal stability thereby rendering it compatible with screen-printed metallization. While TOPCon is commonly realized by low-pressure chemical va...
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| creator | Feldmann, F Fellmeth, T Steinhauser, B Nagel, H Ourinson, D Mack, S Lohmüller, E Polzin, J.-I Benick, J Richter, A Moldovan, A Bivour, M Clement, F Rentsch, J Hermle, M Glunz, S.W |
| description | TOPCon is an appealing choice for next-generation solar cells as it minimizes surface recombination, enables low contact resistivities, and provides high thermal stability thereby rendering it compatible with screen-printed metallization. While TOPCon is commonly realized by low-pressure chemical vapor deposition (LPCVD), this paper discusses the use of a plasma-enhanced chemical vapor deposition (PECVD) tool, which are commonly used for deposition of SiNx or AlOx. It will be shown that thick screen-printing compatible TOPCon layers providing excellent surface passivation can be realized with such tool. Additionally, the firing stability of TOPCon/SiNx stack will be discussed and first solar cell results will be presented. The IV parameters of the best solar cell were: Voc = 691.2 mV, FF = 80.7%, Jsc = 40.4 mA/cm², and = 22.5%. |
| doi_str_mv | 10.4229/EUPVSEC20192019-2EO.1.4 |
| format | Conference Proceeding |
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While TOPCon is commonly realized by low-pressure chemical vapor deposition (LPCVD), this paper discusses the use of a plasma-enhanced chemical vapor deposition (PECVD) tool, which are commonly used for deposition of SiNx or AlOx. It will be shown that thick screen-printing compatible TOPCon layers providing excellent surface passivation can be realized with such tool. Additionally, the firing stability of TOPCon/SiNx stack will be discussed and first solar cell results will be presented. 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| identifier | DOI: 10.4229/EUPVSEC20192019-2EO.1.4 |
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| subjects | cell Herstellung und Analyse von hocheffizienten Si-Solarzellen passivation PECVD Photovoltaik Silicium-Photovoltaik silicon |
| title | Large Area TOPCon Cells Realized by a PECVD Tube Process |
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