Rate and Composition Control for Plasma-assisted EB-PVD Processes by Optical Emission Spectroscopy

Increasing performance requirements of coatings on components and tools drive new approaches and developments, e.g.,in the field of thermal (TBC) and environmental (EBC) barriercoatings on turbine components, characterized by more complex compositions and a desire for morphology control. Consequentl...

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Bibliographische Detailangaben

Hauptverfasser:	Zimmermann, Burkhard, Mattausch, Gösta, Metzner, Christoph
Format:	Artikel
Sprache:	eng
Schlagworte:	HAD PVD Process Spectroscopy
Online-Zugang:	Volltext bestellen
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