Development of a novel high reliable Si-based trace humidity sensor array for aerospace and process industry

In this paper we present high reliable and accurate silicon-based trace humidity sensors for use in aerospace and process industry. The sensors have been realized by using simple MEMS technology in this work. One is a single sensor (sensor cell) for monitoring of humidity, and sensor array is able t...

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Hauptverfasser:	Zhou, Shuyao, Dao, Q.C, Mukhopadhyay, Biswajit, Mackowiak, Piotr, Ehrmann, Oswin, Lang, Klaus-Dieter, Woratz, Michael, Herrmann, Peter, Weiland, T, Pohl, Olaf, Noack, Volker, Ngo, Ha Duong
Format:	Artikel
Sprache:	eng
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