Electrostactically in-plane driven silicon micropump for modular configuration

We present an in-plane reciprocating displacement micropump for liquids and gases which is actuated by a new class of electrostatic bending actuators capable of deflecting beyond the electrode gap distance. The so called “Nano Electrostatic Drive” (NED) actuator was introduced by us in 2015 for out-...

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Bibliographische Detailangaben

Hauptverfasser:	Uhlig, Sebastian, Gaudet, Matthieu, Langa, Sergiu, Schimmanz, Klaus, Conrad, Holger, Kaiser, Bert, Schenk, Harald
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext bestellen
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