Vorrichtung zur Erzeugung eines Plasma-Jets und Verfahren zur Oberflächenbehandlung

Vorrichtung zur Erzeugung eines Plasma-Jets und Verfahren zur Oberflächenbehandlung

The invention relates to a device (1) for generating a plasma jet, comprising at least one flow channel (2) to which a working gas can be supplied, and at least two field electrodes (31, 32, 34, 36) with which an electrical field can be generated in the flow channel (2), wherein the flow channel (2)...

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Hauptverfasser: Viöl, Wolfgang, Damm, Roland, Haese, Christian
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creator Viöl, Wolfgang
Damm, Roland
Haese, Christian
description The invention relates to a device (1) for generating a plasma jet, comprising at least one flow channel (2) to which a working gas can be supplied, and at least two field electrodes (31, 32, 34, 36) with which an electrical field can be generated in the flow channel (2), wherein the flow channel (2) is delimited by at least one dielectric material (10, 11), and the device also contains at least two passive electrodes (41, 42) which are capacitively coupled to each associated field electrode (31, 32, 34, 36). The invention also relates to a method for surface treatment, wherein a plasma jet generated by at least two field electrodes (31, 32, 34, 36) acts on a surface to be treated, and simultaneously a surface discharge acts at least on part of the surface supplied with the plasma jet.
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title Vorrichtung zur Erzeugung eines Plasma-Jets und Verfahren zur Oberflächenbehandlung
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