COMPOSITE CERAMIC DIELECTRICS

An electrostatic chuck (5, 7, 9) is disclosed comprising a base (14), at least one electrode in the form of an electrically conductive layer (13) on the base (14), and a dielectric layer (12, 18) overlaying the conductive layer (13), the dielectric layer (12, 18) comprising inorganic particulate mat...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MERCER, RANDEL, F, SMITH, PETER, C, WOOD, ROBERT, M
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY LIME, MAGNESIA METALLURGY REFRACTORIES SEMICONDUCTOR DEVICES SLAG TREATMENT OF NATURAL STONE
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!