METHOD AND APPARATUS FOR CLEANING

A cleaning method which comprises cleaning an object with a detergent prepared by compounding a basic detergent such as an organosilicon detergent or an isoparaffinic detergent with a detergency improver such as a surfactant or a hydrophilic solvent, rinsing the cleaned object with the basic deterge...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KABUKI, KIMIAKI, SAITOH, NOBUHIRO, IMAJO, YASUTAKA, YAGI, NORIAKI, INADA, MINORU
Format: Patent
Sprache:eng ; jpn
Schlagworte:
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