ENHANCED VERTICAL THERMAL REACTOR SYSTEM

An enhanced vertical thermal reactor system provides three isolated chambers including a wafer handling chamber (12), a process chamber (14) including an elevator, and a cool-down chamber (16), each sealed from the other. The sealing of these individual chambers, each from the other, has the effect...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OZARSKI, ROBERT, G, MCNAUGHTON, ALLEN, D, GLAZE, JAMES, A, DEVILBISS, JOHN, J, LUGOSI, STEVE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FURNACES FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL HEATING KILNS LIGHTING MECHANICAL ENGINEERING OPEN SINTERING OR LIKE APPARATUS OVENS RETORTS SEMICONDUCTOR DEVICES WEAPONS
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