TEMPERATURE-MEASUREMENT DEVICE FOR SEMICONDUCTORS, PROCESS FOR ITS MANUFACTURE AND PROCESS FOR MEASURING THE TEMPERATURE OF SEMICONDUCTORS DURING ANNEALING PROCESSES

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Hauptverfasser: GISDAKIS, SPYRIDON, TEWS, HELMUT, ZWICKNAGL, PETER
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TEWS, HELMUT
ZWICKNAGL, PETER
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS
MEASURING
MEASURING QUANTITY OF HEAT
MEASURING TEMPERATURE
PHYSICS
SEMICONDUCTOR DEVICES
TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
TECHNICAL SUBJECTS COVERED BY FORMER USPC
TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
TESTING
THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
title TEMPERATURE-MEASUREMENT DEVICE FOR SEMICONDUCTORS, PROCESS FOR ITS MANUFACTURE AND PROCESS FOR MEASURING THE TEMPERATURE OF SEMICONDUCTORS DURING ANNEALING PROCESSES
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