MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT

Embodiments of multi-chamber processing tools are provided herein. In some embodiments, a multi-chamber processing tool includes: a factory interface configured to receive a substrate; a pre-heat chamber directly coupled to the factory interface; a load lock chamber coupled to the factory interface...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GOH, Clinton, KOH, Tuck Foong, WEI, Junqi, LIEW, Kai Liang, JUPUDI, Ananthkrishna, AGARWAL, Prashant
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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