VINYL-BASED POLYMER, METHOD FOR PRODUCING SAME, POLISHING LIQUID, AND VINYL-BASED MONOMER

This vinyl-based polymer includes a structural unit (A) derived from a vinyl-based monomer (A) represented by structural formula (1). In structural formula (1), R represents a hydrogen atom or a methyl group, W represents a divalent hydrocarbon group having not more than 6 carbon atoms, X represents...

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Bibliographische Detailangaben
Hauptverfasser: ISO Takamasa, SANAI Yasuyuki, KANBE Shinya, FUJIMOTO Yuya
Format: Patent
Sprache:eng ; fre ; jpn
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