ACOUSTIC WAVE RESONATOR AND PREPARATION METHOD THEREFOR
An acoustic wave resonator and a preparation method therefor. The acoustic wave resonator comprises: a substrate (1), provided with a plurality of cavities (2); a plurality of piezoelectric units, the plurality of piezoelectric units being in one-to-one correspondence with the plurality of cavities...
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| creator | LAI, Kah Keen WU, Ke YAP, ShirNee LOO, Li Eng PANG, Dong Liang |
| description | An acoustic wave resonator and a preparation method therefor. The acoustic wave resonator comprises: a substrate (1), provided with a plurality of cavities (2); a plurality of piezoelectric units, the plurality of piezoelectric units being in one-to-one correspondence with the plurality of cavities (2), the piezoelectric units covering the cavities (2), and each piezoelectric unit comprising a first electrode layer (4), a piezoelectric layer (5) and a second electrode layer (8) which are sequentially stacked from bottom to top; a protective layer (9), stacked on the piezoelectric units; and a series unit, having one end electrically connected to the first electrode layer (4) of one piezoelectric unit and the other end electrically connected to the second electrode layer (8) of another piezoelectric unit, so as to connect the two piezoelectric units in series. The protective layer (9) is provided on the piezoelectric units, such that the piezoelectric units are protected from being further damaged by downstrea |
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| language | chi ; eng ; fre |
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| subjects | BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS |
| title | ACOUSTIC WAVE RESONATOR AND PREPARATION METHOD THEREFOR |
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