MULTI-CHANNEL PRECURSOR DELIVERY SYSTEM

A precursor delivery system for supplying a precursor to a process chamber includes a housing, and a detachable precursor dispensing assembly detachably coupled to the housing and configured to supply the precursor to the process chamber, wherein the detachable precursor dispensing assembly includes...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	RUSSELL, Shoa Allene, HART, Kyle Watt, PREMAKUMAR, Harish Kumar, FISHER, Adam, LETOURNEAU, Steven Payonk, GUPTA, Awnish, RAKESH, Chandrashekar
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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