EXCIMER LASER WITH IMPROVED BEAM UNIFORMITY AND STABILITY

An excimer laser (100) includes a chamber (110) for containing a gas mixture between a rear end (120) and a front end (130) of a linear laser resonator (102), a convex end-mirror (122) defining the rear end (120), and a plurality of output- coupling mirrors collectively defining the front end (130)....

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BEKESI, Jozsef, BRAGIN, Igor
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES USING STIMULATED EMISSION ELECTRICITY
Online-Zugang:	Volltext bestellen
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