FLUORESCENCE MODE FOR WORKPIECE INSPECTION

A beam of light is directed at a workpiece that includes a low-k dielectric material, which causes fluorescence emission from the low-k dielectric material. The workpiece is imaged during fluorescence emission. The imaging can use an optical filter in an imaging path of the beam of light that select...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JAGADESAN, Pradeepkumar, SHAN, Junjun, CHEN, Grace H, WANG, Xuezhen
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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