METHOD FOR ESTIMATING EASE OF FINE POWDER OCCURRENCE IN POLYSILICON, ESTIMATION DEVICE, METHOD FOR PRODUCING POLYSILICON, TRAINED MODEL GENERATION DEVICE AND GENERATION METHOD

The ease of occurrence of fine powder in polysilicon is estimated. Provided is a method for estimating the ease of fine powder occurrence in polysilicon that includes an estimation step that estimates the ease of occurrence of fine powder when vibration is applied to a second polysilicon from second...

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Bibliographische Detailangaben
Hauptverfasser: UESUGI, Shinya, YOSHIMURA, Satoko, NISHIKAWA, Masayoshi
Format: Patent
Sprache:eng ; fre ; jpn
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