ULTRA-CLEAN VAN DER WAALS HETEROSTRUCTURES AND TECHNIQUES OF FABRICATION THEREOF

Disclosed are heterostructures that deploy one or more ultra-clean layers of van der Waals materials (VdW heterostructures). Further disclosed are techniques of fabricating VdW heterostructures that include patterning a conducting layer positioned on a substrate, separating, using a curved lifting s...

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Hauptverfasser: YOUNG, Andrea, COHEN, Liam
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description Disclosed are heterostructures that deploy one or more ultra-clean layers of van der Waals materials (VdW heterostructures). Further disclosed are techniques of fabricating VdW heterostructures that include patterning a conducting layer positioned on a substrate, separating, using a curved lifting surface, the patterned conducting layer from the substrate, and transferring the patterned conducting layer to a receiving stack of one or more layers while removing residual contaminants. L'invention concerne des hétérostructures qui déploient une ou plusieurs couches ultra-propres de matériaux de van der Waals (hétérostructures VdW). L'invention concerne en outre des techniques de fabrication d'hétérostructures VdW qui comprennent la configuration d'une couche conductrice positionnée sur un substrat, la séparation, à l'aide d'une surface de levage incurvée, de la couche conductrice configurée à partir du substrat, et le transfert de la couche conductrice configurée sur un empilement de réception constitué d'une ou plusieurs couches tout en éliminant des contaminants résiduels.
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subjects BASIC ELECTRIC ELEMENTS
CALCULATING
COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS
COMPUTING
COUNTING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PHYSICS
SEMICONDUCTOR DEVICES
title ULTRA-CLEAN VAN DER WAALS HETEROSTRUCTURES AND TECHNIQUES OF FABRICATION THEREOF
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