BULK ACOUSTIC WAVE RESONATOR ASSEMBLY WITH HOLLOW BOTTOM ELECTRODES INSULATED FROM EACH OTHER

The present invention relates to a bulk acoustic wave resonator assembly and a manufacturing method therefor. The assembly comprises: two adjacent bulk acoustic wave resonators arranged on a substrate, wherein bottom electrodes of the two adjacent bulk acoustic wave resonators comprise a first botto...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JIANG, Xingyong, HUANG, Yuanqing, ZHENG, Zhiqiang, HAO, Long, ZHANG, Wei, JI, Yanli, ZHANG, Lanyue
Format:	Patent
Sprache:	chi ; eng ; fre
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS
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