COMPOSITE SUBSTRATE PREPARATION METHOD

The present application provides a composite substrate preparation method. The preparation method comprises the following steps: (1) taking a single-crystal substrate as a seed crystal, and growing a crystal layer on one surface of the single-crystal substrate to obtain a composite crystal layer str...

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Bibliographische Detailangaben
Hauptverfasser: GUO, Chao, TAN, Xianghu, MU, Fengwen
Format: Patent
Sprache:chi ; eng ; fre
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Zusammenfassung:The present application provides a composite substrate preparation method. The preparation method comprises the following steps: (1) taking a single-crystal substrate as a seed crystal, and growing a crystal layer on one surface of the single-crystal substrate to obtain a composite crystal layer structure composed of the single-crystal substrate and the crystal layer; and (2) irradiating the composite crystal layer structure by laser, forming a modified surface in the single-crystal substrate of the composite crystal layer structure, and applying an external force to separate the single-crystal substrate along the modified surface to obtain a composite substrate. According to the preparation method of the present application, by growing a low-quality crystal layer on a high-quality single-crystal substrate, and then performing laser cold cracking cutting treatment, the preparation efficiency of a composite substrate is high, the quality is good, and the application range is wide. La présente demande concerne