PARTICLE MEASURING DEVICE AND PARTICLE MEASURING METHOD

In this particle measuring device, an illuminating optical system and a light receiving optical system are fixed to a stage, and when the stage is moved in a prescribed direction on a plane, the illuminating optical system and the light receiving optical system move as a whole in the prescribed dire...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MATSUDA Tomonobu, SHINOZAKI Daisuke
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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